Substrate transfer apparatus and substrate transfer method
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United States of America Patent
Stats
-
Mar 30, 2004
Grant Date -
Oct 17, 2002
app pub date -
Apr 11, 2002
filing date -
Apr 17, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A substrate transfer apparatus provided with a first substrate transfer mechanism having a first substrate holding hand which is movable while holding a substrate; and a second substrate transfer mechanism having a second substrate holding hand for receiving and transferring a substrate directly from and to the first substrate holding hand. The apparatus has a positioning mechanism disposed, in a moving passage of a substrate held by the first substrate holding hand, independently from the first substrate transfer mechanism, and having a positioning contact portion for regulating the movement of a substrate such that the substrate is positioned at a predetermined position on the first substrate holding hand.
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