Method of detecting pattern defects
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Mar 30, 2004
Grant Date -
N/A
app pub date -
Jun 2, 2000
filing date -
Jun 2, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An input subject pattern is compared with a good product pattern that is registered beforehand, and a different portion of these is detected as a defect pattern. The detected defect pattern is classified in accordance with the features of the contour of the defect pattern.
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