Solution treatment method and solution treatment unit
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Apr 6, 2004
Grant Date -
May 9, 2002
app pub date -
Oct 31, 2001
filing date -
Nov 7, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention is a solution treatment unit for supplying a treatment solution to a substrate and treating the substrate inside an accommodating vessel, comprising a frame for having the accommodating vessel mounted therein. The accommodating vessel has a structure which enables it to be pulled out in a predetermined direction from the frame. Therefore, the accommodating vessel can be pulled out from the frame at the time of maintenance, which makes it possible to secure sufficient work space for performing the maintenance and to appropriately perform the maintenance operation.
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