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United States of America Patent

PATENT NO 6718526
SERIAL NO

10360433

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A system for determining an assigned classification for a set of physical events on a substrate. Sensors sense the physical events on the substrate and produce event data. A plug in rule module manager receives and manages any number of plug in rule modules. Each plug in rule module has an input, a local filter, an analyzer, and an output. The input receives the event data and confidence values from preceding plug in rule modules. The local filter analyzes the received confidence values from the preceding plug in rule modules and selectively by passes the plug in rule module based at least in part upon the received confidence values from the preceding plug in rule modules. The analyzer analyzes the event data in view of a given classification associated with the plug in rule module, and assigns a confidence value based at least in part upon how well the event data fits the given classification. The output provides the confidence value to subsequent plug in rule modules. A post processor receives the confidence values provided by the plug in rule modules, and makes a final selection of the assigned classification to be associated with the set of physical events from the given classifications based at least in part upon a comparison of the confidence values produced by all plug in rule modules.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhagwat, Sandeep Milpitas, CA 5 153
Chi, Kai San Jose, CA 4 64
Eldredge, Peter Scotts Valley, CA 3 224
Huet, Patrick Y San Jose, CA 7 92
Liu, Kai Santa Clara, CA 775 7219
Piramuthu, Robinson San Jose, CA 159 2569
Plihal, Martin Pleasanton, CA 45 445
Roan, Shaio Cupertino, CA 1 64
Shanbhag, Maruti Sunnyvale, CA 2 129

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