Fabrication of devices with fibers engaged to grooves on substrates
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United States of America Patent
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-
Apr 13, 2004
Grant Date -
N/A
app pub date -
Apr 19, 2002
filing date -
Apr 19, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Fabrication techniques for polishing fibers engaged in grooves on substrates. A protection template assembly is disclosed to protect the unpolished portions of fibers. Chemical mechanical polishing may be used to achieve high fabrication throughput and high polishing uniformity. Optical monitoring may be used to monitor the polishing in real time.
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