Electron spectroscopy employing controlled surface charging
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Apr 13, 2004
Grant Date -
Feb 21, 2002
app pub date -
May 3, 2001
filing date -
Jul 6, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method of examining a sample, including: performing a first spectroscopic analysis of a surface portion of the sample when the sample surface portion is in a first electrical charge state; placing the sample surface portion in a second electrical charge state that is different from the first electrical charge state and performing a second spectroscopic analysis of the surface portion of the sample when the sample surface portion is in the second electrical charge state; and comparing the first spectroscopic analysis result with the second spectroscopic analysis result to obtain at least one of structural and electrical information about the sample.
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