Capacitor for an integrated circuit
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United States of America Patent
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Apr 13, 2004
Grant Date -
N/A
app pub date -
Feb 16, 1999
filing date -
Jan 13, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention provides a capacitor comprising a conductive plug comprising a top surface and exposed sidewalls, wherein the sidewalls comprise a layer selected from the group consisting of titanium and titanium nitride, and an electrode material layer over the conductive plug sidewalls, wherein the layer of electrode material is not titanium nor titanium nitride.
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