Micro electromechanical switches
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United States of America Patent
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Apr 13, 2004
Grant Date -
Dec 19, 2002
app pub date -
Apr 1, 2002
filing date -
Apr 2, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
Characteristics of micro electromechanical switches can be changed by applying a control signal which either changes one or more parameters of the micro electromechanical switches or which controls beam movement by feedback signals. It is thereby possible to change switching transient time, maximum switching frequency, power tolerance, and/or sensitivity (actuation voltage) of a micro electromechanical switch.
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