Method and apparatus for evaluating the runability of a photomask inspection tool
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United States of America Patent
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Apr 13, 2004
Issued Date -
N/A
app pub date -
Nov 20, 2001
filing date -
Mar 24, 2000
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and apparatus evaluates the runability of a photomask inspection tool that inspects plural sets of die, each die having a standard simulated industrial device feature at plural technology nodes. A technology node size is determined for each feature at which inspection by the tool provides no false detection of faults. A sensitivity module included on a photomask test plate along with a runability module allows determination of inspection tool sensitivity and runability in a single test sequence.
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