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United States of America Patent

PATENT NO 6722956
APP PUB NO 20010006880A1
SERIAL NO

09748385

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A finishing grindstone member (20) is fixed to a spindle (10) by a bolt. In the spindle (10), there is formed a tool mounting portion (25) into which a rough grindstone member can be mounted. Into the tool mounting portion (25), there can be mounted not only the rough grindstone member but also a cover member (36). After a silicone wafer is roughly ground using the rough grindstone member, when finish grinding the silicone wafer using the finishing grindstone member (20), the cover member (36) is mounted onto the tool mounting portion (25) to thereby prevent the tool mounting portion (25) from being soiled.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
KOMATSU NTC LTDNANTO-SHI TOYAMA 939-1595

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kawatsu, Tomoyuki Kanagawa, JP 4 9
Murai, Shirou Kanagawa, JP 9 66
Okuyama, Tetsuo Kanagawa, JP 49 716
Saita, Kunihiro Kanagawa, JP 1 7
Wada, Toyotaka Kanagawa, JP 9 89

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