High-purity low-resistivity electrostatic chucks
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United States of America Patent
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Apr 20, 2004
Grant Date -
N/A
app pub date -
Dec 9, 1999
filing date -
Dec 9, 1999
priority date (Note) -
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Abstract
The volume resistivity of a body consisting essentially of aluminum nitride is reduced by exposing the body to a soak temperature of at least about 1000.degree. C. in an atmosphere deficient in nitrogen, such as an atmosphere consisting essentially of argon. The body can be, for example, a green body of aluminum nitride powder of a densified, or sintered body, such as a polycrystalline body. An electrostatic chuck has an electrode within a chuck body. A first portion of the chuck body, at a first side of the electrode, has a volume resistivity less than about 1.times.10.sup.13 ohm.multidot.cm at about 23.degree. C. A second portion of the body, at a second side of the electrode, has a volume resistivity within one order of magnitude that of the first portion.
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