Hermetically sealed micro-device package using cold-gas dynamic spray material deposition
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United States of America Patent
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Apr 20, 2004
Issued Date -
N/A
app pub date -
Apr 26, 2002
filing date -
Mar 22, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method for manufacturing a cover assembly including a transparent window portion and a metallic frame that can be joined to a micro-device package base to form a hermetically sealed micro-device package. A sheet of a transparent material is provided having a window portion defined thereupon, the window portion having finished top and bottom surfaces. A frame-attachment area is prepared on the sheet, the frame-attachment area circumscribing the window portion. A first quantity of powdered metal particles is sprayed onto the prepared frame-attachment area of the sheet using a jet of gas, the gas being at a temperature below the fusing temperature of the metal particles. The jet of gas has a velocity sufficient to cause the metal particles to merge with one another upon impact with the sheet and with one another so as to form an initial continuous metallic coating adhering to the frame-attachment area of the sheet. Successive quantities of powdered metal particles are applied over the initial continuous metallic coating using the jet of gas so as to form a continuous built-up metallic frame incorporating the initial continuous metallic coating as its base and having an overall thickness that is a predetermined thickness.
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