Variable shape mirror and its manufacturing method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Apr 27, 2004
Grant Date -
May 16, 2002
app pub date -
Nov 7, 2001
filing date -
Nov 16, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A variable shape mirror comprises a frame member having an opening, and a thin film having a first region including a reflecting plane and a second region of higher rigidity than the first region disposed in the outer periphery of the first region, being supported in the opening of the frame member. Other variable shape mirror comprises a frame member having a first opening and a second opening, a first thin film having a reflecting plane, forming an electrode, and supported in the first opening of the frame member, a second thin film forming an electrode electrically conducting with the electrode of the first thin film, and supported in the second opening of the frame member, and a substrate bonded to the frame member at a specified interval, and having an electrode at a position opposite to the electrode of the second thin film.
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