Piezoceramic multilayer actuators and a process for their manufacture
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United States of America Patent
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-
May 4, 2004
Grant Date -
Oct 31, 2002
app pub date -
Feb 21, 2002
filing date -
Mar 6, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
During operation, large tensile stresses act on the insulating region under the base metallization with external electrodes on piezoceramic multilayer actuators. Since this insulating region forms a homogeneous unit together with the base metallization and the interconnecting layer, this fails when the tensile strength of the weakest element is exceeded and cracks develop. The cracks running unchecked through the insulating region are very critical, since they reduce the insulation distance and seriously increase the probability of actuator failure due to flashovers. According to the invention it is therefore proposed that, in the inactive region (14), the surface (10) of the multilayer actuator (1) has a pattern (18) that is produced by erosions (19) interrupting the surface (10), and that the base metallization (11) is deposited exclusively on the surface (10) left by the pattern (18).
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