Method and apparatus for simultaneous measurement of the refractive index and thickness of thin films
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United States of America Patent
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May 4, 2004
Grant Date -
Feb 6, 2003
app pub date -
Jun 18, 2001
filing date -
Jun 18, 2001
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Abstract
A beam deflection technique for simultaneous measurements of the thickness, refractive index and optical absorption of transparent materials using a charge coupled device (CCD) camera is provided. The method comprises measuring beam deflection after transmission through or reflection off a sample of interest at variable incidence angles to the sample surface. The measurement of beam deflection as a function of incident angle is related through Snell's Law directly to the sample thickness and sample index of refraction.
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