Working chamber system and seal device
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United States of America Patent
Stats
-
May 11, 2004
Grant Date -
Oct 31, 2002
app pub date -
Apr 17, 2002
filing date -
Apr 25, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A sealing device is provided for a working chamber system with a robot hand (216) that extends into the working chamber (100) through an aperture (120) by means of which a seal may be established and removed by remote control. The sealing device includes: (a) a flexible sealing element (20) by means of which an inner pass-through ring element (40) is connected with the edge of the aperture (120); (b) at least two coupling elements that are attached to the pass-through ring element (40) and (c) at least one locking element that is connected with the robot hand (216) and that may be positioned by means of positioning elements for coupling of the robot hand (216) with the pass-through ring element (40) by means of the coupling elements.
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Cited Art Landscape
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