Filter unit, chemical liquid supply system, and chemical liquid supply method
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United States of America Patent
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May 11, 2004
Grant Date -
Sep 19, 2002
app pub date -
Sep 21, 2001
filing date -
Mar 15, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A filter unit in which a solution storage chamber for storing a chemical liquid supplied from a solution tank and a filter material housing chamber for filtering the chemical liquid in the solution storage chamber by a filter to supply the chemical liquid to a pump are integrally formed is integrally arranged together with the pump. An exhaust path for exhausting air in a solution guide path for causing the solution storage chamber to communicate with the solution tank and the solution storage chamber, and a pump inlet-side path for causing the filter material housing chamber to communicate with the pump are arranged.
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