Liquid substrate collector
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United States of America Patent
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-
May 11, 2004
Grant Date -
Aug 28, 2003
app pub date -
Feb 28, 2002
filing date -
Feb 28, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for removing selected metal ions from a plasma includes a plasma chamber and at least one silica substrate mounted inside the chamber. More specifically, the substrate is exposed in the chamber so that when metal ions from the plasma contact the substrate they diffuse into the substrate to create a liquified layer. A receptacle is also provided to receive the liquid from the layer as it flows from the substrate.
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