Method and device for producing solar cells
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United States of America Patent
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May 11, 2004
Grant Date -
N/A
app pub date -
Sep 26, 2002
filing date -
Oct 13, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention concerns a process for fabricating a solar cell, wherein material is deposited on a multicrystalline silicon substrate and passivation is performed by means of hydrogen plasma. It is proposed that the material be deposited by low-pressure CVD and the hydrogen passivation be effected by feeding in a hydrogen plasma induced remotely from the partially processed solar cells. A device for carrying out the process is also described.
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