Thin-film piezoelectric resonator, band-pass filter and method of making thin-film piezoelectric resonator
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United States of America Patent
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May 11, 2004
Grant Date -
Jun 12, 2003
app pub date -
Apr 8, 2002
filing date -
Oct 26, 2001
priority date (Note) -
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Abstract
A thin-film piezo-resonator includes a silicon substrate and a resonator assembly. The substrate is formed with a cavity or through-hole which is opened in the upper and the lower surfaces of the substrate. The resonator assembly, disposed at a location corresponding to the cavity, is composed of a first electrode contacting the upper surface of the substrate, a piezoelectric layer formed on the first electrode and a second electrode formed on the piezoelectric layer. The cavity has a side surface extending in a substantially perpendicular direction to the first surface.
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