Importance

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Abstract

A counterbalanced actuator for steering a beam of light is disclosed. The actuator includes a rotatable actuator member coupled to a substrate, a movable portion of an actuator drive mechanism coupled to the rotatable actuator member, a balancing spring coupled between the substrate and the movable portion of the actuator drive mechanism, and an actuator arm operably coupled to the movable portion of the actuator drive mechanism. The balancing spring maintains the movable portion of the actuator drive mechanism nominally, parallel to the substrate when the actuator arm is rotated. An optical mirror element is coupled to the actuator arm. The actuator also includes apparatus for applying a first drive voltage to the movable portion of the actuator drive mechanism and a second drive voltage to a fixed portion of the actuator drive mechanism to position the mirror. Also disclosed is an optical subassembly for directing at least one beam of light including a plurality of micromirror assemblies on a substrate, where each micromirror assembly includes an optical mirror coupled to a plurality of counterbalanced actuators attached to the substrate. A method of actuating a micromirror assembly and a system for actuation the micromirror assembly is also disclosed.

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First Claim