Method of producing an integrated reference pressure sensor element
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United States of America Patent
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May 18, 2004
Grant Date -
Jun 19, 2003
app pub date -
Aug 20, 1999
filing date -
Feb 20, 1997
priority date (Note) -
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Abstract
A method of manufacturing a pressure sensor house assembly which contains a reference cavity, in which a vacuum exists, and a getter capable of being thermally activated. The getter is activated by directly contacting the getter with an exterior heated body, conducting heat from the exterior heated body, maintaining the exterior heated body in direct contact with the getter for a predetermined period of time, and removing the exterior heated body.
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