Method of delivering target object to be processed, table mechanism of target object and probe apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 25, 2004
Grant Date -
Apr 18, 2002
app pub date -
Aug 21, 2001
filing date -
Aug 22, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In the present invention, a main chuck comprises a table for performing the delivery of a wafer W to and from a pincette and a plurality of lift pins for allowing the wafer W to rise from the surface of the table. At least one lift pin positioned on the side of the pincette is made longer and positioned higher than the other lift pins so as to permit the wafer W to be supported above the table in an inclined manner.
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