Method and system for detecting an arc condition
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United States of America Patent
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May 25, 2004
Grant Date -
Jul 3, 2003
app pub date -
Dec 28, 2001
filing date -
Dec 28, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A method and apparatus for detecting an arc condition in a semiconductor test system is disclosed. While probes in a semiconductor test system are being moved into or out of contact with a semiconductor wafer, the voltage level of power supplied to selected ones of the probes is monitored. If the voltage level of the power exceeds a level that could cause an arc between the probes and the semiconductor wafer while the wafer is being moved, an indication is generated that an arc condition has been detected.
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