In-situ source metrology instrument and method of use
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United States of America Patent
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May 25, 2004
Issued Date -
N/A
app pub date -
Oct 9, 2001
filing date -
Feb 10, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process of measuring the radiant intensity profile of an effective source of a projection image system that has an effective source, an object plane, an imaging objective, an exit pupil, and an image plane. The improved process consists of selecting at least one field point and a corresponding aperture plane aperture and projecting a plurality of images of the selected field point through the corresponding selected aperture plane aperture at a plurality of various intensities of the effective source. By analyzing the recorded images of the effective source at various intensities it is possible to determine a radiant intensity profile of the image source at the selected field point.
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