Spectroscopic ellipsometry analysis of object coatings during deposition
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United States of America Patent
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May 25, 2004
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N/A
app pub date -
Jul 19, 2002
filing date -
Jul 20, 2001
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Abstract
Disclosed is methodology for determination of parameters which characterize parameters such as thickness, color or quality of films deposited onto objects of arbitrary shapes, utilizing spectroscopic ellipsometry applied to standard shaped objects.
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