Deflectable micromirrors with stopping mechanisms
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United States of America Patent
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May 25, 2004
Grant Date -
Dec 26, 2002
app pub date -
May 24, 2002
filing date -
Aug 11, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A spatial light modulator having a micromirror and one or more deflection limiting mechanisms, and a process for fabrication therefor. In one embodiment, the mirror support structure has a deflection stopping mechanism that limits the tilt angle of the reflective plate. Alternatively, a deflection stopping mechanism can be provided separate from the mirror support structure. The deflection stopping mechanism can be used in conjunction with one or more additional stopping mechanisms such as the abutment of a portion of the reflective plate against the substrate upon which it was constructed and/or abutment of the micromirror on a surface or structure of the circuit substrate.
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