Method of using heat-depolymerizable polycarbonate sacrificial layer to create nano-fluidic devices
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United States of America Patent
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Jun 1, 2004
Grant Date -
Jan 16, 2003
app pub date -
May 24, 2002
filing date -
May 25, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A polycarbonate polymer such as poly(cyclohexene carbonate) acts as a positive electron beam resist, is substantially transparent to ultra violet light and that depolymerizes when heated. The polymer acts as a positive electron beam resist at 5 kV, and depolymerizes at temperatures between approximately 200-300.degree. C. The polymer is removable from underneath other layers by heating, facilitating fabrication of overhanging structures such as tubes by depositing layers on top of the polymer.
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