High resolution analytical probe station
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Jun 1, 2004
Grant Date -
Mar 6, 2003
app pub date -
Apr 8, 2002
filing date -
Aug 27, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A specimen probing apparatus in provided including a vacuum chamber within which a carrier for the specimen to be probed and a probe assembly are positioned. The housing for the chamber is preferably constructed to allow a variety of options for electrically isolating the test environment in the chamber. Also, unique drive or shift assemblies for the carrier and probe assembly are disclosed for allowing precision movements thereof in the vacuum chamber.
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