Fabrication method of flash memory device with L-shaped floating gate
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United States of America Patent
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Jun 8, 2004
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N/A
app pub date -
Jan 7, 2003
filing date -
Jan 7, 2003
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Expired
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Abstract
The present invention generally relates to provide a fabrication method of a flash memory with L-shaped floating gate. The present invention utilizes a dielectric spacer on a surface of a semiconductor substrate to form a L-shaped poly spacer, which is so called the L-shaped floating gate. The respective inside portion of L-shaped floating gate is gibbous and to form a tip structure. Then, an isolating dielectric layer and a control gate are formed thereon. The control gate is covering the gibbous tip structure of the L-shaped floating gate to complete a flash memory device. The present invention is provided with a channel length, which is stably and easily controlled, and a tip structure for point discharging. Hence, the present invention can enhance the isolating effect between the control gate and the floating gate to achieve the purpose of repeating control the fabrication of the semiconductor devices.
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