Piezoelectric thin film resonator and frequency variable resonator using the resonator
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United States of America Patent
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Jun 8, 2004
Grant Date -
Mar 27, 2003
app pub date -
Sep 6, 2002
filing date -
Sep 21, 2001
priority date (Note) -
Expired
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Abstract
A piezoelectric thin film resonator which comprises a first electrode, a second electrode, and a piezoelectric film which is interposed between the first electrode and the second electrode, and formed of an epitaxial ferroelectric thin film containing barium titanate, a spontaneous polarization of the epitaxial ferroelectric thin film being uniaxially orientated in a direction normal to a film surface.
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