Importance

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Abstract

A pendulum scanner that utilizes a rocking motion to scan across a sample surface is provided. The scanner is present as a component in a scanning probe microscope that includes a microscope base, an optical stage, and a sample stage. The optical stage includes a source of a collimated beam of light, at least one beam tracking element, and a first scanning element for generating movement of the optical stage in a first plane. The microscope also includes a cantilever probe having a light-reflective surface. A second scanning element is provided for generating movement of the optical stage in a second plane that is orthogonal to the first plane. A position sensitive detector is also provided and is adapted to receive a beam of light reflected from the surface of the cantilever probe and to produce a signal that is indicative of the angular movement of the reflected beam of light.

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First Claim