Micromirror

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United States of America Patent

PATENT NO 6749308
SERIAL NO

10169247

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Abstract

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A micromirror (5), a micro-oscillating mirror in particular, having an at least largely cantilevered mirror surface (10) which may be displaced from the rest position about at least one torsional axis (17) is described. The mirror surface (10) is linked to at least one support body (11, 12) by at least two torsion beams (13, 13'), which are arranged at least approximately parallel to each other. Also described is the displacement of the micrometer from its rest position by an electrostatic or magnetic interaction.

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Patent Owner(s)

Patent OwnerAddress
ROBERT BOSCH GMBHPOSTFACH 30 02 20 STUTTGART 70442

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Funk, Karsten Mountain View, CA 47 2276
Niendorf, Andreas Berlin, DE 10 167

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