Photoresist strippers containing reducing agents to reduce metal corrosion
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United States of America Patent
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Jun 15, 2004
Issued Date -
N/A
app pub date -
Oct 2, 2001
filing date -
Oct 7, 1993
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Alkaline photoresist stripping compositions containing a reducing agent to reduce or inhibit metal corrosion are disclosed. Reducing agents include compounds containing reactive multiple bonds, hydrazine and derivatives thereof, oximes, hydroquinone, pyrogallol, gallic acid and esters thereof, tocopherol, 6-hydroxy-2,5,7,8-tetramethylchroman-2-carboxylic acid, BHT, BHA, 2,6-di-tert-butyl-4-hydroxymethyl-phenol, thiols, salicylaldehyde, 4-hydroxybenzaldehyde and glycol aldehyde dialkylacetals.
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