Alkali-based treating liquid, treating liquid adjusting method and equipment, treating liquid supplying method and equipment
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United States of America Patent
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Jun 22, 2004
Grant Date -
May 22, 2003
app pub date -
Aug 9, 2002
filing date -
Aug 16, 2001
priority date (Note) -
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Abstract
A treating liquid adjusting equipment for adjusting an alkali-based treating liquid for use in treating an organic film applied onto a substrate, which includes an adjusting portion. The adjusting portion for adjusting an alkalinity of the alkali-based treating liquid is such that a concentration of a first component contained in the alkali-based treating liquid and constituting an organic film of a same type as or different type from the organic film is in a range of 0.0001 to 2.0 mass %, and a concentration of an alkali component contained in the alkali-based treating liquid is in a range of 0.05 to 2.5 mass %.
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