Soaking apparatus
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United States of America Patent
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-
Jun 22, 2004
Grant Date -
Jun 26, 2003
app pub date -
Nov 27, 2002
filing date -
Dec 25, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Soaking apparatus to treat materials which require higher accuracy in soaking and improved cleanliness. The soaking apparatus includes a heat treatment apparatus having walls, a ceiling and a floor, each divided into a plurality of sections, a heater block mounted on each section, a thermal sensor mounted to each heater block, and a thermal controller to control heating of the heater blocks based on a temperature measured by the thermal sensor.
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