System for MEMS inspection and characterization
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United States of America Patent
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Jun 22, 2004
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N/A
app pub date -
Apr 18, 2002
filing date -
Apr 18, 2002
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Abstract
A surface of the component in MEMS is illuminated by an illumination beam and the reflected beam is collected and detected by a position sensitive detector or photo detector array. As the surface is tilted about a pivot or about X and Y axes, the change in position of the collected beam is detected for characterizing the mechanical and optical properties of MEMS.
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