Microinterferometer for measuring distance with improved sensitivity
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United States of America Patent
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Jun 22, 2004
Grant Date -
Feb 27, 2003
app pub date -
Mar 29, 2002
filing date -
Mar 29, 2001
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The present invention relates to microinterferometers. An embodiment of a microinterferometer for accurately measuring the distance to an object surface includes a substrate and a tunable, phase-sensitive, reflective diffraction grating formed atop said substrate. The diffraction grating is configured to reflect a first portion of an incident light and transmit a second portion of the incident light, such that the second portion of the incident light is diffracted. The diffraction grating is further configured to be controllably adjusted. The microinterferometer also includes a photo-detector for receiving interference patterns produced from the first portion of the incident light reflected from the diffraction grating and the second portion of the incident light reflected from the object surface. The microinterferometer also includes a controller coupled to the photo-detector and the diffraction grating for adjusting the diffraction grating, such that the interference patterns are altered. Systems and methods are also disclosed.
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