Method for making a microstructure by surface micromachining
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United States of America Patent
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Jun 29, 2004
Grant Date -
Oct 24, 2002
app pub date -
Apr 23, 2001
filing date -
Apr 23, 2001
priority date (Note) -
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Abstract
Various methods for forming surface micromachined microstructures are disclosed. One aspect relates to executing surface micromachining operation to structurally reinforce at least one structural layer in a microstructure. Another aspect relates to executing the surface micromachining operation to form a plurality of at least generally laterally extending etch release channels within a sacrificial material to facilitate the release of the corresponding microstructure.
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