Carbon nanobimorph actuator and sensor
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United States of America Patent
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Jun 29, 2004
Grant Date -
Dec 5, 2002
app pub date -
Jan 18, 2002
filing date -
Jan 19, 2001
priority date (Note) -
Expired
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Abstract
A nanomechanical actuator/oscillator device and system are provided. The nanomechanical actuator/oscillator device comprising nanobimorphs, such as nanotubes, designed such that inducing a difference in charge density between the tubes (e.g. by biasing one tube positive with respect to the other with sufficient tube-to-tube contact resistance) induces lateral movement in the end of the bimorph, forming a nanoscale resonator, as well as a force sensor when operated in an inverse mode. A method of producing a novel nanobimorph structure with integrated electrodes is also provided.
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