Light modulation element, GLV device, and laser display
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United States of America Patent
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Jul 6, 2004
Grant Date -
Feb 20, 2003
app pub date -
Jul 8, 2002
filing date -
Jul 6, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A light-modulation element is constituted as a light-modulation element for constituting a GLV device and has the same constitution as the conventional light-modulation element except for differing in the structure of the combined light-reflective film and membrane-side electrode of a membrane. The combined light-reflective film and membrane-side electrode is composed of a two-layer metallic film forming a TiN film of 10 nm to 70 nm in thickness provided as a lower layer and an Al film of 50 nm to 150 nm in thickness provided thereon. In the combined light-reflective film and membrane-side electrode, the Al film has a smooth reflective surface and a high light-reflectance, so that the light-utilization efficiency of the light-modulation element is high.
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