Importance

Loading Importance Indicators...

Abstract

A vibration damper for a semiconductor wafer handling arm includes a spring and a mass coupled to the spring to form a mass spring system that is tuned to vibrate at a structural resonant frequency of the vibrating wafer handling arm. The spring has temperature insensitive spring characteristics and the mass and spring are constructed of materials that do not outgas or produce contaminants in a semiconductor processing environment. The mass spring system is preferably a cantilever beam spring connected to a high response point on the vibrating arm and oriented to vibrate in a plane perpendicular to the plane of the wafer. The mass is preferably slidably adjustable along the length of the cantilever beam spring to adjust the resonant frequency of the vibration damper. Vibration damping of the wafer handling arm is accomplished by the transfer of kinetic energy from the vibrating wafer handling arm to the mass spring system.

Loading the Abstract Image...

First Claim