Grating structures and methods of making the grating structures
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United States of America Patent
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Jul 13, 2004
Grant Date -
Sep 26, 2002
app pub date -
Feb 21, 2001
filing date -
Feb 21, 2001
priority date (Note) -
Expired
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Abstract
New grating structures include a bonded transmission grating structure. The grating structure is encapsulated by two pieces that are bonded together. In addition, a new method of making grating structures includes forming wells with an aspect ratio (depth:width) of at least 3:1, 7:1 or greater. Such grating structures can be used to form gratings with high diffraction efficiencies for both TE and TM polarizations of light.
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