Method of manufacturing a scalable flash EEPROM memory cell with floating gate spacer wrapped by control gate

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United States of America Patent

PATENT NO 6764905
SERIAL NO

10616358

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Abstract

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A scalable flash EEPROM cell having a semiconductor substrate with a drain and a source and a channel therebetween. A select gate is positioned over a portion of the channel and is insulated therefrom. A floating gate is a spacer having a bottom surface positioned over a second portion of the channel and is insulated therefrom. The floating gate has two side surfaces extending from the bottom surface. A control gate is over the floating gate and includes a first portion that is adjacent the floating gate first side surface, and a second portion adjacent the floating gate second side surface.

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Patent Owner(s)

Patent OwnerAddress
INTEGRATED MEMORY TECHNOLOGIES INCSANTA CLARA CA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jeng, Ching-Shi Los Altos Hills, CA 6 240
Wang, Ching Dong Cupertino, CA 3 39

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