Method for producing a transition edge sensor
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United States of America Patent
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-
Jul 20, 2004
Grant Date -
Nov 21, 2002
app pub date -
Apr 30, 2002
filing date -
May 16, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method of producing a transition edge sensor comprises depositing a sensing material upon a substrate to form a sensing layer having an associated transition temperature. The transition temperature for the sensing layer is selected as desired. The desired transition temperature is produced by controlling the temperature of the substrate for the deposition process.
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