Susceptor with built-in plasma generation electrode and manufacturing method therefor
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United States of America Patent
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Jul 27, 2004
Grant Date -
May 8, 2003
app pub date -
Oct 29, 2002
filing date -
Nov 8, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The invention provides a susceptor with a built-in plasma generation electrode that can make the throughput by a range of plasma processing of a plate specimen uniform, and that has excellent plasma resistance, thermal conductivity and durability, and a manufacturing method that can obtain this susceptor with a built-in plasma generation electrode easily and economically. The susceptor with a built-in plasma generation electrode 11 of the present invention comprises: a mounting plate 12 formed from a ceramic, whose surface is a mounting surface 12a for mounting a plate specimen; a support plate 14 which supports this mounting plate 12 and in which a fixing hole 13 is formed; a plasma generation electrode 15 provided between the mounting plate 12 and the support plate 14; and a power supply terminal 16 provided in the fixing hole 13, wherein a region 21 in the vicinity of the connection of the plasma generation electrode 15 to the power supply terminal 16 has a lower resistance than the other region 22 of the plasma generation electrode 15.
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