Near-field optical probe having cantilever and probe formed of transparent material, method for manufacturing near-field optical probe, and optical apparatus having near-field optical probe

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United States of America Patent

PATENT NO 6768095
APP PUB NO 20010011704A1
SERIAL NO

09740664

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Abstract

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A near-field optical probe has a cantilever formed of a transparent material and having a first main surface and a second main surface opposite the first main surface. A base supports the cantilever at the first main surface. A tip extends from the second main surface of the cantilever and has a microscopic aperture at an end thereof. The tip is formed of a transparent material having a higher refractive index than that of the transparent material of the cantilever to increase an amount of near-field light generated or detected by the microscopic aperture. A shade film is formed on the second main surface of the cantilever and on a surface of the tip except for the microscopic aperture.

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Patent Owner(s)

Patent OwnerAddress
SEIKO INSTRUMENTS R & D CENTER INCCHIBA COUNTY JAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichihara, Susumu Chiba, JP 29 360
Kasama, Nobuyuki Chiba, JP 68 710
Kato, Kenji Chiba, JP 319 2972
Mitsuoka, Yasuyuki Chiba, JP 72 824
Niwa, Takashi Chiba, JP 125 1097
Oumi, Manabu Ciba, JP 87 549

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