Micromachined pyro-optical structure
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United States of America Patent
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Aug 3, 2004
Grant Date -
Jul 17, 2003
app pub date -
Jan 14, 2002
filing date -
Jan 14, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
This invention is a micromachined sensor pixel structure that can be fabricated either as a discrete sensor or in array form with application to thermal sensing of radiation receive from various wavelength emitters. The transmissivity of a thermally-isolated microplatform is a sensitive function of temperature. This transmissivity is modulated by incident radiation from sources including infrared sources. The transmissivity of a micromachined structure is interrogated by means of an optical carrier. Readout is obtained by means of conventional silicon optical sensors or imagers. A multiplicity of micromachined pixels can be tailored for specific wavelengths permitting the array to operate as a multispectral imager with windows ranging from ultraviolet to millimeter wavelengths.
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