Fluorine generator
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United States of America Patent
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Aug 10, 2004
Grant Date -
Apr 15, 2004
app pub date -
Oct 15, 2002
filing date -
Oct 15, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A fluorine generator includes a vacuum chamber filled with a working gas. An r-f antenna is positioned outside the chamber across a dielectric window from a potassium fluoride (KF) source located in the chamber. The r-f antenna radiates through the window to heat the working gas and sublime the PK source to create a plasma. Crossed electric and magnetic fields in the chamber drive the heavier potassium ions in the plasma toward a collector in the chamber while confining the lighter fluorine and working gas ions for evacuation from the chamber.
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