Actuator
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United States of America Patent
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-
Aug 10, 2004
Issued Date -
N/A
app pub date -
May 30, 2002
filing date -
Oct 25, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The invention aims at suppressing an amount of deformation of a central portion of a movable part in a micro-miniature semiconductor actuator. A boundary portion is provided between a central portion and an edge of a movable part which is axially supported in a rotatable manner by torsion bars of an actuator, the boundary portion suppressing transmission of a warp due to an influence of air resistance at the edge of the movable part or moment of inertia, or heat generated by a driving force generating portion at the edge of the movable part, to a central portion of the movable part, to suppress deformation of the central portion of the movable part.
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